Data-driven methods for machine-induced metrology errors
Michael Aldorf
Supervisor TU Delft: Alexander Heinlein
Supervisor
ASML: Sjoerd Wiarda
start of the project: February 2024
The Master project has been finished in March 2025
by the completion of the
Masters Thesis
and a final
presentation
has been given.
For working address etc. we refer to our
alumnipage.
Summary of the master project:
Description
Contact information:
Kees
Vuik
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or the
Master students page of Kees Vuik